21A X-ray Nanodiffraction

XND

Beamline Parameters

Source:

ID, IUT-22 undulator

Monochromator:

crystal monochromator

Si(111) 4-Bounce Channel-Cut Monochromator

Energy Range:

5-30 keV (white-beam); 7-25 keV (mono-beam)

Energy Resolution:

10-4

Focused Spot Size:

80 x 80 nm2 (lateral); 40 nm (depth)

Flux range (ph/s):

3x1011 (7 keV); 3x109 (25 keV)

Detector:

In-vacuum Pilatus3S-6M; Pilatus2-100K; Burker SDD 80 mm2

Cryo Capability:

Janis ST-400 XND version, 100-800 K

Laue X-ray Detector

Type

DECTRIS PILATUS3S 6M (NSRRC In-vacuum version)

Operation Mode

Vacuum (Chiller Temperature = 15 oC)

Ambient (Chiller Temperature = 23 oC)

Sensor Thickness

1000 µm

Vacuum Compatibility

10-7 Torr

Frame Rate

25 Hz

Sensitive Area

423.6 x 434.6 mm (width x height)

Pixel Size

172 x 172 µm2

Total Pixels

2463 x 2527 = 6,224,001

Porject X-ray Detector

Type

DECTRIS PILATUS2 100K

Operation Mode

Ambient (air cooling)

Sensor Thickness

450 µm

Vacuum Compatibility

None

Frame Rate

600 Hz

Sensitive Area

83.8 x 33.5 mm (width x height)

Pixel Size

172 x 172 µm2

Total Pixels

487 x 195 = 94,965

Silicon Drift Detector

Type

Bruker XFlash 5100 LN

Sensor Area

100 mm2 (Active 80 mm2)

Energy Resolution

125 eV (Fe)

Vacuum Compatibility

UHV

Scanner

Type

SmarAct SLC & SLL positioner

Sensor Resolution

1 nm (closed-loop)

Repeatability

± 30 nm (over full travel range)

Vacuum Compatibility

< 10-6 mbar

3D SLC Stage

4 (DAXM, STM, STM/Indentor, NSOM)

Loading Capacity 

20 N (SmarPod); 3 N (3D SLC Stage)

Cluster System

Panel content

Storage Farm (NAS)

Total capacity : 325 TB

Find a Beamline

21A Home

Specifications

Endstations

Staff

BL Schedule

Optical Layout

Techniques

Publications

User Activities

Beamline Information

2018 XMAS Workshop

2017 XMAS Workshop

Gallery


 Contacts

Endstation

Ext. 2211

BL Spokesperson

—Ching-Shun Ku (古慶順)
csku@nsrrc.org.tw
Ext. 7119

BL Local Contact/Manager

—Shang-Jui Chiu (邱上睿)
chiu.sj@nsrrc.org.tw
Ext. 7128


Techniques

  • 2D/3D X-ray Laue diffraction
  • Nano X-ray fluorescence
  • Qudraprobe; SEM; SPM
  • Nano X-ray absorption fine structures (XAFS)
  • Nano X-ray excited optical luminescence (XEOL)
  • Nano projection X-ray microscopy (PXM)
  • Scanning electron microscopy (SEM)
  • Cathode luminescence (CL)
  • Scanning Probe Microscopy

Disciplines

  • Materials science
  • Environment and energy related research
  • High pressure physics
  • Physics
  • Nanomaterials
  • Semiconductor devices
  • Energy materials
  • Geoscience
  • Nanotechnology
  • Condensed matter physics
  • Functional materials
  • Photovoltaic materials

General Information

  • Source: 21A
  • Energy Range: 5-30 keV (white-beam), 7-25 keV (mono-beam)
  • Focused Spot Size: 80 x 80 nm² (lateral); 40 nm (depth)
  • Status: operational







National Synchrotron Radiation Research Center

101 Hsin-Ann Road, Hsinchu Science Park, Hsinchu, Taiwan 30076

+886-3-578-0281