21A X-ray Nanodiffraction


Summary of Techniques

The FORMOSA end-station provided following techniques for users.

  • 2D/3D scanning Laue diffraction
  • Nano-beam X-ray Flourescence Mapping
  • Nano-beam X-ray Absorption Spectroscopy/Imaging
  • Projection X-ray Microscopy/Imaging (PXM)
  • X-ray Excited Optical Luminescence
  • In-situ SPM tetra-probes for electrical, optical, mechical and surface measurements
  • On-line SEM system for quick sample positioning and probes navigation

The summary of techniques of FORMOSA as shown in below;

2D Laue Diffraction

FORMOSA equipped with large area hybird pixel array (PAD) detector on the top of sample stage to collect Laue diffraction pattern. Combined with precise scanner, users can probing the variation of crystal or thin film to obtained a series of Laue patterns . After obtained the patterns, we can adopt specific software (ex. XMAS, LaueTools, LaueGo...etc) to analyize the patterns and extract useful information of crystal, such as phases, orientations, dislocation density, strain and stress.

Laue diffraction pattern from Si (111) crystal

Si (111) Laue pattern indexed by XMAS software

Nanobeam Bragg Diffraction (nano-XRD)

Nanobeam X-ray Fluorescence (nano-XRF)

Nanobeam X-ray Absorption (nano-XAS)

Nanobeam X-ray Excited Optical Luminescence (nano-XEOL)

Panel content

In-situ Scanning Probe Microscopy

Panel content

Find a Beamline

21A Home




BL Schedule

Optical Layout



User Activities

Beamline Information

2018 XMAS Workshop

2017 XMAS Workshop




Ext. 2211

BL Spokesperson

—Ching-Yu Chiang (蔣慶有)
Ext. 2211

BL Local Contact/Manager

—Chia-Hsien Lin (林家賢)
Ext. 2211


  • 2D/3D X-ray Laue diffraction
  • Nano X-ray fluorescence
  • Qudraprobe; SEM; SPM
  • Nano X-ray absorption fine structures (XAFS)
  • Nano X-ray excited optical luminescence (XEOL)
  • Nano projection X-ray microscopy (PXM)
  • Scanning electron microscopy (SEM)
  • Cathode luminescence (CL)
  • Scanning Probe Microscopy


  • Materials science
  • Environment and energy related research
  • High pressure physics
  • Physics
  • Nanomaterials
  • Semiconductor devices
  • Energy materials
  • Geoscience
  • Nanotechnology
  • Condensed matter physics
  • Functional materials
  • Photovoltaic materials

General Information

  • Source: 21A
  • Energy Range: 5-30 keV (white-beam), 7-25 keV (mono-beam)
  • Focused Spot Size: 80 x 80 nm² (lateral); 40 nm (depth)
  • Status: operational

National Synchrotron Radiation Research Center

101 Hsin-Ann Road, Hsinchu Science Park, Hsinchu, Taiwan 30076