23A X-ray Nanoprobe

Schematic diagram of X-ray Nanoprobe


The nanoprobe endstation provides a large collection of X-ray techniques, namely, X-ray absorption fine structures (XAFS), X-ray fluorescence (XRF), X-ray excited optical luminescence (XEOL), projection X-ray microscope (PXM). All these are with 40 nm spatial resolution. This endstation also aims for even higher resolution beyond the diffraction limit of the focusing optics by adapting coherent X-ray diffraction imaging (CDI) and Bragg-ptychography. Powerful supporting systems are equipped into the endstation. To name a few, a scanning electron microscope (SEM) can quickly locate the sample position and also serves as an electron source for imaging and cathode luminescence; a multi-axis laser interferometer system in cooperation with ultrahigh precision translational stages for monitoring on-the fly-scanning; a load lock system for quickly transferring as well as triggering sample growth; a helium cryo-cooling system for sample environment as low as 10 K. The Montel optics is stationed in high vacuum (1 x 10-6 torr) chamber with a precise controlled temperature ±0.02 K in 48 hours.

Appearance of experimental main chamber

Mirrorholder (left) , Montel mirrors (medium) and Mirrors in main chamber (right)

Sample load-lock chamber (left) and sample load-lock rod (right)

Scanning electron Microscope (SEM)

X-ray excited optical luminescence (XEOL) system

Interlock control system of  vacuity and turbopump rotation velocity

Laser interferometer system

Sample Environments

High vacuum, He-cryo stage, in-situ electric system, in-situ chemical cell, etc.

Computer System

2 sets of workstation, each equipped with 2x Nvidia K80 GPU card.

Find a Beamline

23A Home




BL Schedule

Optical Layout



Other BL Info



BL Spokesperson

—Lin, Bi-Hsuan (林碧軒)
Ext. 7307

BL Local Contact/Manager

—Tseng, Shao-Chin (曾紹欽)


Ext. 7370


  • Nano X-ray fluorescence (XRF)
  • Nano X-ray absorption fine structures (XAFS)
  • Nano X-ray excited optical luminescence (XEOL)
  • Nano projection X-ray microscopy (PXM)
  • Coherent X-ray diffraction imaging (CXDI)
  • Bragg-ptychography
  • Scanning electron microscopy (SEM)
  • Cathode luminescence (CL)
  • On-the-fly scanning


  • Materials science
  • Physics
  • Nanomaterials
  • Semiconductor devices
  • Energy materials
  • Geoscience
  • Chemistry
  • Biomedical Engineering

General Information

  • Source: 23A
  • Energy Range: 4-15 KeV
  • Focused Spot Size: 40 nm @ 10 keV
  • Status: under construction

National Synchrotron Radiation Research Center

101 Hsin-Ann Road, Hsinchu Science Park, Hsinchu, Taiwan 30076