The X-ray Nanoprobe (XNP) beamline and associated facility at the Taiwan Photon Source (TPS) provides multimodal X-ray probes for resolving the atomic, chemical and electronic structures of modern advanced materials, with 40 nm spatial resolution in 3D tomographic and nondestructive manners. Synergizing X-ray coherent techniques with in-situ driven environments, the beamline is able to provide detections within even sub-ten nms for once hard measurements such like mapping the dynamic interfacial strain inside nano devices. In addition to X-rays, the facility offers electron-based probes, such like SEM and cathode luminescence. With various sample environments and ultra fast detection, the beamline is leading in the world for in-situ investigations for semiconductor-base devices, quantum devices, nano-materials, energy materials, emergent 2D materials, etc.

The beamline adopts the light source generated by a 22 mm period in-vacuum undulator (IU22). A symmetric focal spot is generated by utilizing a two stage focusing strategy. The horizontal focusing mirror (HFM1) incorporated with a high precision slit 3 creates a horizontal virtual source. Followed by a second HFM2, the horizontal virtual source is projected back to the center of undulator to form a symmetric light source with a demagnification ratio around 627 in both vertical and horizontal direction.

HDCM chamber

HFM1 chamber

High vacumn stainless steel tube

HFM2 chamber

The Montel optics forms a nanometer-focal spot from two sequential reflections by two identical mirrors nesting side-by-side. The numerical aperture is thus enlarged, resulting a smaller diffraction-limit focal spot. The Montel optics is of essential advantage in obtaining larger working distance for accumulating multimodal X-ray probes, particularly for the present beamline with only moderate length (75 m).

In order to preserve the transversal coherence of light source, the entire beamline will be operated under vacuum environment.