27A Soft X-ray Nanoscopy

Soft X-ray Nanoscopy for
Scanning Transmission X-ray Microscopy (STXM) and
Photoelectron Related Imaging and Nanospectroscopy (PRINS)

27A consists of two microscopes that use either photon or photo-excited electron to probe the electronic structures of materials in reduced dimensions.  Coherence imaging (ptychography) and momentum-space imaging are available to meet the needs of advanced material analysis.

Scientific Scope

X-ray microscopy is under a rapid growth along with the increased availability on high brightness synchrotron facilities around the world. Nowadays, soft X-ray imaging methods have evolved into three general types:
(i) scanning imaging; the X-ray is focused through optical elements (zone plate or KB mirror) to form a nanoprobe, and an image is recorded via raster scanning the nanosized probe across desired area,
(ii) full-field imaging; either X-ray optics or electron column is used to magnify signals emitted from regions illuminated with X-ray,
(iii) lensless imaging; scattered signals from far-eld coherent X-ray illumination is recorded and inverted back into real space images.
We intend to pursue all three approaches at Nanoscpy beamline.

Beamline Description

TPS 27A beamline is powered by an elliptically polarized undulator (EPU) with magnets at a 66 mm period length, and photons are monochromized by active gratings to cover an energy window of 90 to 2200 eV at a resolving power of 10,000. The beamline is to host two microscopes in separated branches.
At the first branch, it sits a zone-plate-based scanning transmission X-ray microscope (STXM) developed jointly with Prof. Way-faung Peng at Tamkang University.  The STXM is capable of recording absorption-based images as well as coherent diffraction images (ptychography).
The second branch is to host a photoelectron related imaging and nanospectroscopy (PRINS) station. With an imaging type electron column integrated with a double hemispherical electron energy analyzer, the microscope at PRINS station is an energy-compensated full-field microscope capable of collecting photoelectrons in either real-space or momentum-space mode.
With the capabilities described above, the Nanoscopy beamline is expected to attract a broad range of domestic and international users whose expertise includes environment, energy, polymer, magnetism, semiconductor, and low-dimensional physics and chemistry.

Beamline Layout

Find a Beamline

27A Home




Optical Layout







(27A1) Ext. 2271 

(27A2) Ext. 2272

BL Spokesperson

Wei, Der-Hsin (魏德新)
Ext. 8307 / 7312

Hsu, Yao-Jane (許瑤真)
Ext. 8305 / 7311

BL Manager/Local Contact

Shiu, Hung-Wei (許紘瑋)
Ext. 7119

Chuang, Tzu-Hung (莊子弘)
Ext. 2272 / 7350


  • Angle-Resolved PhotoEmission Spectroscopy
  • Soft X-ray imaging
  • Scanning transmission X-ray microscopy
  • Soft X-ray ptychography
  • Photoelectron microscopy
  • Momentum microscopy
  • X-ray absorption Spectroscopy (XAS)


  • Materials science
  • Environment and energy related research
  • Physics
  • Nanomaterials
  • Chemistry
  • Functional materials
  • Soft X-ray imaging
  • Carbon-related systems and nanomaterials
  • Photovoltaic materials
  • Magnetic materials
  • Low dimension materials

General Information

  • Source: EPU66
  • Energy Range: 90-2500 (Linear Polarization), 90-1200 (Circular Polarization)
  • Focused Spot Size: 30 x 30 nm² @STXM, 10 x 10 μm² @PRINS
  • Status: commissioning

National Synchrotron Radiation Research Center

101 Hsin-Ann Road, Hsinchu Science Park, Hsinchu, Taiwan 30076