21A X-ray Nanodiffraction


Scientific Scope

This beamline offers 2D/3D Laue diffraction with sub-100 nm spatial resolution to characterize the local deformation, stress and strain partitioning, fatigue, grain growth, recrystallization, and texture development of heterogeneous materials such as soils, minerals, composites, or alloys.

Beamline Description

The beamline is dedicated to white/mono-beam Laue diffraction for structural analysis. For instance, users could obtain the 2D and 3D distribution of phases, orientation, residual strain, stress, and dislocations for materials in a complex form without destroying the samples during measurement. The estimated spatial resolution could be better than 100 x 100 x 50 nm. Furthermore, this end-station provided many complementary tools. Tetra-probe stages collect optical, electrical, and surface properties of specimens; the fluorescence detector provides elemental information, and the cryo-stage is integrated with the heater for temperature dependence experiments. Particularly, it is also the first time in synchrotron history to integrate an online real-time scanning electron microscopy (SEM) as a navigator to find out the interest region with tiny structures on samples and arrange the position for different probes. Depending on the user's demands, This end-station can function in vacuum or ambient environments. The station mounts an adjustment structure and settles on an active vibration cancellation optical table which minimizes the vibration level. In summary, this beamline and end-station will provide not only 2D/3D-XRD but also XRF, XAS, XEOL/CL, SPM, and SEM information for diverse research programs.

Find a Beamline

21A Home




BL Schedule

Optical Layout



User Activities

Beamline Information

2018 XMAS Workshop

2017 XMAS Workshop




Ext. 2211

BL Spokesperson

—Ching-Yu Chiang (蔣慶有)
Ext. 2211

BL Local Contact/Manager

—Wan-Zhen Hsieh (謝宛蓁)
Ext. 2211


  • 2D/3D X-ray Laue diffraction
  • Nano X-ray fluorescence
  • Qudraprobe; SEM; SPM
  • Nano X-ray absorption fine structures (XAFS)
  • Nano X-ray excited optical luminescence (XEOL)
  • Nano projection X-ray microscopy (PXM)
  • Scanning electron microscopy (SEM)
  • Cathode luminescence (CL)
  • Scanning Probe Microscopy


  • Materials science
  • Environment and energy related research
  • High pressure physics
  • Physics
  • Nanomaterials
  • Semiconductor devices
  • Energy materials
  • Geoscience
  • Nanotechnology
  • Condensed matter physics
  • Functional materials
  • Photovoltaic materials

General Information

  • Source: IUT22-3m
  • Energy Range: 5-30 keV (white-beam), 7-25 keV (mono-beam)
  • Focused Spot Size: 80 x 80 nm² (lateral); 40 nm (depth)
  • Status: operational

National Synchrotron Radiation Research Center

101 Hsin-Ann Road, Hsinchu Science Park, Hsinchu, Taiwan 30076